Dry etching method

Details Dry etching method Dry etching method

2004-06-11

2010-06-01

Cleveland, Michael (Department: 1792)

Etching a substrate: processes

Masking of a substrate using material resistant to an etchant

Reexamination Certificate

active

07727412

ABSTRACT:
A dry etching method and the like that can process a layer to be processed in a fine pattern to have a peripheral portion of an angular shape, are described. This dry etching method forms a step portion21along a peripheral portion of a first mask layer20that corresponds to an outline of an etching pattern in such a manner that the step portion21projects toward an opposite side to a magnetic thin layer18(layer to be processed).

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