Dry etching method, fine structure formation method, mold...

Details Dry etching method, fine structure formation method, mold... Dry etching method, fine structure formation method, mold...

2011-04-05

2011-04-05

Norton, Nadine G (Department: 1713)

Etching a substrate: processes

Gas phase etching of substrate

C438S706000

Reexamination Certificate

active

07919005

ABSTRACT:
A WC substrate7is etched by using plasma50generated from a gas including a chlorine atom.

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