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Ultrafine fabrication method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Ultrafine pattern forming method and ultrafine etching method us

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Ultraminiature fiber optic pressure transducer and method of...

Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate

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Ultrashort pulse high repetition rate laser system for biologica

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Ultraviolet-curable resin material for pattern transfer and...

Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate

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Uniform chemical etching method

Etching a substrate: processes – Nongaseous phase etching of substrate – Projecting etchant against a moving substrate or controlling...
Reexamination Certificate

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Uniform emitter array for display devices, etch mask for the...

Etching a substrate: processes – Forming or treating an article whose final configuration has...
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Uniform emitter array for display devices, etch mask for the...

Etching a substrate: processes – Forming or treating an article whose final configuration has...
Reexamination Certificate

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Uniform etch system

Etching a substrate: processes – Gas phase etching of substrate
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Uniform etch system

Etching a substrate: processes – Gas phase etching of substrate
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Unitary micro-flexure structure and method of making same

Etching a substrate: processes – Forming or treating electrical conductor article
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Use of a chemically active reticle carrier for photomask...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Use of an organic dielectric as a sacrificial layer

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Use of chemical mechanical polishing in micromachining

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Use of fluorinated additives in the etching or polishing of...

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
Reexamination Certificate

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Use of perfluoroketones as vapor reactor cleaning, etching,...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Use of ta/tan for preventing copper contamination of low-k...

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Using ARL to decrease EPD noise in CMP process

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
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UV-LIGA process for fabricating a multilayer metal structure...

Etching a substrate: processes – Forming or treating an ornamented article
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UV/halogen treatment for dry oxide etching

Etching a substrate: processes – Gas phase etching of substrate
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