FIB milling of copper over organic dielectrics
Film formation apparatus and method of using the same
Film removal employing a remote plasma source
Film removal method and apparatus
Fin structure formation
Fine pattern forming method and fine pattern device
Fluorine free integrated process for etching aluminum...
Gas composition for dry etching and process of dry etching
Gas distribution system
Gas-phase etching and regrowth method for Group III-nitride crys
Hermetic low dielectric constant layer for barrier applications
High aspect ratio contacts
High aspect ratio etch using modulation of RF powers of...
High etch rate residue free metal etch process with low frequenc
High frequency plasma process wherein the plasma is executed by
High pressure high non-reactive diluent gas content high...
High selectivity etch using an external plasma discharge
High-density plasma etching of carbon-based low-k materials...
High-density plasma, organic anti-reflective coating etch...
High-frequency semiconductor wafer processing apparatus and meth