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Method for etching polysilicon to have a smooth surface

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for fabricating fine pattern in semiconductor device

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for fabricating semiconductor device

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for forming a step on a deposition surface of a substrate

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for forming minute pattern and method for forming...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for hot wall reactive ion etching using a dielectric or m

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for improving the rate of a plasma enhanced vacuum treatm

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for manufacturing a substrate having an irregular shape

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for patterning and etching film layers of semiconductor d

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for performing plasma process on particles

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for plasma etching of high-K dielectric materials

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for plasma processing at high pressure

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for plasma treatment and apparatus for plasma treatment

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for preventing contamination in a plasma process chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for preventing corrosion of a dielectric material

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for processing silicon using etching processes

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for producing structures having a high aspect ratio...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for producing tips for atomic force microscopes

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for protecting a paper security document or...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for realizing microchannels in an integrated structure

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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