Methods for reducing mask erosion during plasma etching

Methods for wafer to wafer bonding using microstructures

Methods of bridging lateral nanowires and device using same

Methods of fabricating MEMS and microfluidic devices using...

Methods of manufacturing micro-lens array substrates for impleme

Micro movable device and method of making the same using wet...

Micro needles and method of manufacture thereof

Micro-actuator and method making the same

Micro-electromechanical die module with planarized thick film la

Micro-fabricated electrokinetic pump

Micro-machining minute hollow using native oxide membrane

Microbellows actuator

Microelectromechanical capactive accelerometer and method of...

Microelectromechanical device manufacturing process

Microelectromechanical mirror and mirror array

Microelectromechanical signal processor fabrication

Microfabricated apertures for supporting bilayer lipid...

Microfabricated filter and shell constructed with a...

Microfabrication process for enclosed microstructures

Microfluidic device, and related methods