Micro movable device and method of making the same using wet...

Details Micro movable device and method of making the same using wet... Micro movable device and method of making the same using wet...

2006-03-16

2009-06-02

Alanko, Anita K (Department: 1792)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S013000, C216S017000, C216S039000, C216S041000, C216S049000, C216S057000, C216S083000, C216S095000, C216S096000, C216S099000, C029S025350, C438S052000, C438S053000, C438S694000, C438S700000, C438S704000, C438S745000, C438S756000

Reexamination Certificate

active

07540968

ABSTRACT:
A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.

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