Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent
1997-02-20
1999-02-16
Chin, Christopher L.
Etching a substrate: processes
Etching of semiconductor material to produce an article...
216 24, 216 26, 359642, 359648, 359729, 427162, 4271632, 427165, 430296, 430302, 430321, B29D 1100, G02B 300
Patent
active
058716530
ABSTRACT:
Three process flows for manufacturing the micro-lens array substrates are disclosed. The process flows consist of two main parts. The first part of the process flows involves fabrication of a master mold. The first two process flows utilize photolithography means to print and dry etch the micro-lens array pattern on the substrate, which is covered by a oxidation or a wet etch stopping layer. The desired surface curvature corresponding to the desired size, shape, and pattern of the micro-lens array is created by either oxidizing the exposed silicon layer (in the first process flow) or to wet-etch the exposed SiO2 by using HF solutions (in the second process flow). The third process flow creates damaged areas by using a focused laser light at first. Then, the damaged areas are preferably etched by solutions, leaving the desired surface curvature. The second part of the process flows uses the master mold to make the secondary molds and third molds, and finally micro-lens array substrate through the conventional processes. Two applications of the micro-lens array substrates into flat panel display are also disclosed. First, to achieve wider viewing angle, higher resolution, higher brightness, and lower manufacturing cost, a conventional light diffuser and one substrate facing the viewer of two parallel transparent substrates sandwiching the liquid crystal in flat panel display can be replaced by a transparent micro-lens array substrate (or sheet) fabricated with the presently inventive process. Furthermore, a micro-lens array sheet made with the present inventive process flow can be attached such a substrate to reduce the manufacturing cost. Second, in a LCD utilizing phosphor elements as light source, a micro-lens array plate can be used to focus the UV light onto the phosphor elements for reduction of power consumption by the lamps.
REFERENCES:
patent: 5148322 (1992-09-01), Aoyama et al.
Advanced Materials Engineering Research Inc.
Chin Christopher L.
Lin Bo-In
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