Micro-actuator and method making the same

Details Micro-actuator and method making the same Micro-actuator and method making the same

2006-08-15

2006-08-15

Olsen, Allan (Department: 1763)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C438S106000

Reexamination Certificate

active

07090781

ABSTRACT:
An extremely small, self-moved, impact driven microactuator is disclosed that has a movable mass member electrostatically driven and which eliminates the need for it to be assembled individually. The microactuator includes a fixing member (1) securely connected to a pedestal part (14), an elastic support beam member (2) having one end securely connected to the fixing member, a movable mass member (3) fastened to the other end of the elastic support beam member, a driving electrode and a stopper member (4, 5) each securely connected to the pedestal part and spacedly juxtaposed with the movable mass member, and a power supply circuit (9) for applying a voltage between the movable mass and driving electrode members. In operation, turning the power supply circuit ON generates electrostatic attraction between the driving electrode member and movable mass members, thereby bringing the movable member into collision with the stopper member, followed by the transmission of a kinetic energy then produced to the outer frame part, and subsequently turning the power supply circuit OFF removes the electrostatic attraction, thereby permitting the movable mass member to return to its original position under an elastic force exerted by the elastic support beam member, followed by the transmission of a reaction force then produced to outer frame part, whereby the microactuator is bodily moved in a given direction.

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