Microfluidic device, and related methods

Details Microfluidic device, and related methods Microfluidic device, and related methods

2007-06-18

2010-12-14

Ahmed, Shamim (Department: 1713)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S037000, C438S048000, C438S053000, C137S015010, C137S013000

Reexamination Certificate

active

07850861

ABSTRACT:
A method of making a microfluidic device is provided. The method features patterning a permeable wall on a substrate, and surrounding the permeable wall with a solid, non-permeable boundary structure to establish a microfluidic channel having a cross-sectional dimension less than 5,000 microns and a cross-sectional area at least partially filled with the permeable wall so that fluid flowing through the microfluidic channel at least partially passes through the permeable wall.

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Lopez, et al., In Site Fabricated Microchannels Using Porous Polymer and Zenon Difluoride Etchant, Carnegie Mellon University.

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