Microfabrication process for enclosed microstructures

Details Microfabrication process for enclosed microstructures Microfabrication process for enclosed microstructures

1997-06-02

2000-07-25

Gulakowski, Randy

Etching a substrate: processes

Etching of semiconductor material to produce an article...

216 11, 216 41, 216 46, 216 51, 438 52, H01L 21302

Patent

active

060933305

ABSTRACT:
A single-mask process for fabricating enclosed, micron-scale subsurface cavities in a single crystal silicon substrate includes the steps of patterning the substrate to form vias, etching the cavities through the vias, and sealing the vias. Single cavities of any configuration may be produced, but a preferred embodiment includes closely spaced cavity pairs. The cavities may be separated by a thin membrane, or may be merged to form an enlarged merged cavity having an overhanging bar to which electrical leads may be connected. A three-mask process for fabricating enclosed cavities with electrical contacts and electrical connections is also disclosed.

REFERENCES:
patent: 3867497 (1975-02-01), Teich et al.
patent: 4178197 (1979-12-01), Marinace
patent: 4417946 (1983-11-01), Bohlen et al.
patent: 4429321 (1984-01-01), Matsumoto
patent: 4438191 (1984-03-01), Cloutier et al.
patent: 4533430 (1985-08-01), Bower
patent: 4566935 (1986-01-01), Hornbeck
patent: 4587534 (1986-05-01), Saito et al.
patent: 4614119 (1986-09-01), Zavracky et al.
patent: 4701766 (1987-10-01), Sugitani et al.
patent: 4716423 (1987-12-01), Chan et al.
patent: 4756884 (1988-07-01), Hillman et al.
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4786357 (1988-11-01), Campanelli et al.
patent: 4824073 (1989-04-01), Zdeblick
patent: 4863560 (1989-09-01), Hawkins
patent: 4875968 (1989-10-01), O'Neill et al.
patent: 4891120 (1990-01-01), Sethi et al.
patent: 4894664 (1990-01-01), Tsung Pan
patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 4908112 (1990-03-01), Pace
patent: 4961821 (1990-10-01), Drake et al.
patent: 4968585 (1990-11-01), Albrecht et al.
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5090932 (1992-02-01), Dieumegard et al.
patent: 5096535 (1992-03-01), Hawkins et al.
patent: 5116462 (1992-05-01), Bartha et al.
patent: 5126768 (1992-06-01), Nozawa et al.
patent: 5132012 (1992-07-01), Miura et al.
patent: 5156988 (1992-10-01), Mori et al.
patent: 5180480 (1993-01-01), Manz
patent: 5194133 (1993-03-01), Clark et al.
patent: 5198390 (1993-03-01), MacDonald et al.
patent: 5209818 (1993-05-01), Bol
patent: 5211806 (1993-05-01), Wong et al.
patent: 5229785 (1993-07-01), Leban
patent: 5287082 (1994-02-01), Arney et al.
patent: 5296114 (1994-03-01), Manz
patent: 5304487 (1994-04-01), Wilding et al.
patent: 5316979 (1994-05-01), MacDonald et al.
patent: 5317533 (1994-05-01), Quate et al.
patent: 5393375 (1995-02-01), MacDonald et al.
patent: 5399415 (1995-03-01), Chen et al.
patent: 5415727 (1995-05-01), Gal et al.
patent: 5426070 (1995-06-01), Shaw et al.
patent: 5619476 (1997-04-01), Haller et al.
patent: 5628917 (1997-05-01), MacDonald et al.
patent: 5637904 (1997-06-01), Zettler
patent: 5658472 (1997-08-01), Bartha et al.
patent: 5662814 (1997-09-01), Sugino
patent: 5681484 (1997-10-01), Zanzucchi et al.
patent: 5683546 (1997-11-01), Manaka
patent: 5690841 (1997-11-01), Elderstig
patent: 5698112 (1997-12-01), Naeher et al.
patent: 5719073 (1998-02-01), Shaw et al.
patent: 5935451 (1999-08-01), Dautartas et al.
patent: 6020272 (2000-02-01), Fleming
Jingkuang Chen and Kensall D. Wise; "A Multichannel Neural Probe For Selective Chemical Delivery at the Cellular Level"; pp. 256-259, Jun. 1994.
Mark Zdeblick, Founder and Gordon Moore, Cofounder; Redwood Microsystems. New Frontier in Silicon Micromachining; Redwood Microsystems, Inc.

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