Microelectromechanical signal processor fabrication

Details Microelectromechanical signal processor fabrication Microelectromechanical signal processor fabrication

1995-06-07

1996-12-31

Powell, William

Etching a substrate: processes

Etching of semiconductor material to produce an article...

216 11, 216 33, 216 67, 1566501, 1566571, H01L 2100

Patent

active

055890822

ABSTRACT:
A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.

REFERENCES:
patent: 4918032 (1990-04-01), Jain et al.
patent: 4997521 (1991-03-01), Howe et al.

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