Inductively coupled RF plasma source

Inductively excited ion source

Inductively generated streaming plasma ion source

Inductively-coupled high density plasma producing apparatus and

Inductively-coupled plasma source

Inductively-coupled-plasma-processing apparatus

Inductively-driven light source for microscopy

Inner/outer coaxial tube arrangement for a plasma pinch chamber

Ion accelerator arrangement

Ion accelerator arrangement

Ion beam gun

Ion energy attenuation method by determining the required number

Ion implantation and surface processing method and apparatus

Ion implantation helicon plasma source with magnetic dipoles

Ion plasma electron gun

Ion plasma electron gun

Ion plasma electron gun

Ion plasma electron gun with dose rate control via amplitude mod

Ion plating apparatus

Ion source with external RF antenna