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One atmosphere, uniform glow discharge plasma

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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Operating a plasma process

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Optimization of the excitation frequency of a resonator

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Optimized ECR plasma apparatus with varied microwave window thic

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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Optimized helical resonator for plasma processing

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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