Magnetic and electrostatic confinement of plasma with tuning...

Magnetic and electrostatic confinement of plasma with tuning...

Magnetic and electrostatic confinement of plasma with tuning...

Magnetic filter for ion source

Magnetic flux shaping in ion accelerators with closed...

Magnetic mirror plasma source

Magnetic mirror plasma source and method using same

Magnetic system, particularly for ECR sources, for producing...

Magnetically enhanced capacitive plasma source for ionized...

Magnetically enhanced capacitive plasma source for ionized...

Magnetically-filtered cathodic arc plasma apparatus

Magnetron for low pressure full face erosion

Magnetron plasma apparatus with concentric magnetic means

Magnetron plasma source

Matching network for RF plasma source

Matching unit and plasma processing system

Mechanism for minimizing ion bombardment energy in a plasma...

Metal ion plasma generator having magnetic field forming device

Metal ion plasma generator having rotatable anode plate

Method and apparatus for controlling electrostatic coupling to p