Inductively generated streaming plasma ion source

Details Inductively generated streaming plasma ion source Inductively generated streaming plasma ion source

2006-07-25

2006-07-25

Vu, David (Department: 2828)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C315S111810, C156S345480

Reexamination Certificate

active

07081711

ABSTRACT:
A novel pulsed, neutralized ion beam source is provided. The source uses pulsed inductive breakdown of neutral gas, and magnetic acceleration and control of the resulting plasma, to form a beam. The beam supplies ions for applications requiring excellent control of ion species, low remittance, high current density, and spatial uniformity.

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