Hall effect ion source at high current density
Hall thruster with shared magnetic structure
Hall-current ion source for ion beams of low and high energy...
Handheld atmospheric pressure glow discharge plasma source
Harmonic cold plasma device and associated methods
Helicon hall thruster
Helicon plasma processing tool utilizing a ferromagnetic inducti
High brightness point ion sources using liquid ionic compounds
High current density cathode structure
High current density glow discharge switch
High density plasma formation using whistler mode excitation in
High density plasma tool with adjustable uniformity and...
High energy cathode device with elongated operating cycle time
High frequency coupler, and plasma processing apparatus and...
High frequency discharging method and apparatus, and high...
High frequency discharging method and apparatus, and high...
High frequency inductive generator for the inductive coil of a p
High frequency plasma power source and impedance matching device
High frequency power source having corrected power output
High frequency power source, plasma processing apparatus,...