Scalable helicon wave plasma processing device with a non-cylind

Scanned electron cyclotron resonance plasma source

Section of pipe for a gas treatment device and device...

Selectively controllable gas feed zones for a plasma reactor

Semiconductor processing apparatus

Semiconductor wafer treating device utilizing a plasma

Shielded rf antenna

Simultaneous discharge apparatus

Slotted waveguide structure for generating plasma discharges

Slow-wave induction plasma transport

Solenoid and monocusp ion source

Source and method for generating high-density plasma with induct

Source for the generation of large area pulsed ion and electron

Spark gap control

Stabilized oscillator circuit for plasma density measurement

Stabilizer for switch-mode powered RF plasma

Stabilizing plasma and generator interactions

Stable matching networks for plasma tools

Stand alone plasma vacuum pump

Steady-state glow-discharge plasma at atmospheric pressure