Aliasing sampler for plasma probe detection

Alternating current multi-phase plasma gas generator with...

Antenna device for generating inductively coupled plasma

Antenna for producing uniform process rates

Apparatus and method for electrical insulation in plasma...

Apparatus and method for forming a high pressure plasma...

Apparatus and method for forming a high pressure plasma...

Apparatus and method for generating plasma of uniform flux densi

Apparatus and method for igniting plasma in a process module

Apparatus and method for plasma treatment of substrates

Apparatus and method using optical energy for specifying and qua

Apparatus and methods for generating persistent ionization...

Apparatus and methods for generating persistent ionization...

Apparatus and methods for improving the stability of RF...

Apparatus for controlling matching network of a vacuum plasma pr

Apparatus for elimination of plasma lighting inside a gas...

Apparatus for exciting a plasma in a semiconductor wafer process

Apparatus for generating a compound plasma configuration...

Apparatus for generating a pulsed plasma in a liquid medium

Apparatus for generating low temperature plasma at...