Particle accelerator

Particle controller

Particle source for a reactive ion beam etching or plasma deposi

Particle source, especially for reactive ionic etching and plasm

Phase and frequency control of a radio frequency generator...

Planar crossed-field plasma switch and method

Planar gas introducing unit of a CCP reactor

Plasma accelarator arrangement

Plasma accelerating apparatus and plasma processing system...

Plasma accelerator with closed electron drift

Plasma accelerator with closed electron drift

Plasma accelerator with closed electron drift

Plasma apparatus

Plasma apparatus

Plasma apparatus including plasma-measuring device

Plasma beam generating method and apparatus which can generate a

Plasma cleaning device

Plasma coil

Plasma containment device

Plasma control system