Capacitatively coupled plasma device

Capacitive feed for plasma reactor

Capacitively coupled plasma reactor with magnetic plasma...

Capacitively coupled plasma reactor with uniform radial...

Capacitively coupled radiofrequency plasma source

Capacitively coupled radiofrequency plasma source

Ceramic protection for heated metal surfaces of plasma processin

Ceramic protection for heated metal surfaces of plasma processin

Charged particle control device

Charged particle source and operation thereof

Charged particle source of large current with high energy

Circuit for adjusting the impedance of a plasma section to a hig

Circuit means for automatically establishing an arc in a plasma

Circuitry for operating a glow discharge path

Circular waveguide plasma microwave sterilizer apparatus

Circular waveguide plasma microwave sterilizer apparatus

Close coupled match structure for RF drive electrode

Closed electron drift hall effect plasma accelerator with all ma

Cluster tool soft etch module and ECR plasma generator therefor

Coaxial resonator microwave plasma generator