Purge heater design and process development for the...
Reaction chamber design and method to minimize particle generati
Reducing hydrogen concentration in pecvd amorphous silicon carbi
Replaceable plate expanded thermal plasma apparatus and method
RF current return path for a large area substrate plasma...
RF plasma reactor and methods of generating RF plasma
RF plasma reactor having a distribution chamber with at...
RF plasma-enhanced deposition of fluorinated films
Roll-vortex plasma chemical vapor deposition method
Rugate filter and method of making same
Sequential chemical vapor deposition
Shallow trench isolation filled by high density plasma chemical
Sheet plasma CVD apparatus
Silica microspheres, method for making and assembling same...
Silicon device production
Silicon dioxide deposition by plasma activated evaporation...
Silicon nitride thin films with improved properties
Silicon nitrogen-based films and method of making the same
Silicon oxide film formation method
Silicon oxide film, method of forming the silicon oxide...