Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate
2007-12-11
2007-12-11
Meeks, Timothy (Department: 1762)
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
C118S7230AN, C118S7230ER, C156S345330, C156S345340, C216S071000
Reexamination Certificate
active
10300873
ABSTRACT:
A plasma reactor has a reactor vessel and a pair of electrodes in the form of spaced apart and oppositely disposed metallic surfaces defining therebetween a plasma discharge space. At least one of the metallic surfaces is the surface of a metallic plate having a plurality of gas feed openings extending through the metallic surface towards said discharge space and from a distribution chamber extending along the plate opposite the discharge space. The distribution chamber has a wall opposite and distant from the plate and includes a gas inlet arrangement with a plurality of gas inlet openings distributed along the wall and connected to one or more gas feed lines to the reactor. A gas flow resistant coefficient between the one or more gas feed lines and at least a predominant portion of the connected inlet openings are at least substantially equal.
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French Search Report Dated Nov. 28, 2003.
Barreiro Jean
Chevrier Jean-Baptiste
Schmitt Jacques
Turlot Emmanuel
Meeks Timothy
Turocy David
Unaxis Balzers Aktiengesellschaft
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