Electrode assembly for plasma processing apparatus

Details Electrode assembly for plasma processing apparatus Electrode assembly for plasma processing apparatus

2003-07-22

2009-06-09

Zervigon, Rudy (Department: 1792)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230AN, C156S345330, C156S345340

Reexamination Certificate

active

07543547

ABSTRACT:
An electrode assembly for a plasma processing apparatus includes a backing member secured to an electrode. First fastener members mounted in apertures in the backing member cooperate with second fastener members to hold the electrode assembly to a support member, such as a temperature-controlled top plate in a plasma processing chamber.

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http://www.kenforginginc.com/products/t-Slot—nuts/.
http://kenforging.thomasnet.com/viewitems/machine-shop-tools/t-slot-nuts?&plpver=1001&forward=1&backtoname=&pane=.
http://www.kenforginginc.com/t-slot—nuts.html—Jan. 22, 2007.
http://kenforging.thomasnet.com/viewitems/machine-shop-tools/t-slot-nuts?&forward=1—Jan. 22, 2007.

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