Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2005-04-19
2005-04-19
Hassanzadeh, Parviz (Department: 1763)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C118S7230AN, C118S720000, C427S580000
Reexamination Certificate
active
06881270
ABSTRACT:
An electrode arrangement for the plasma-aided coating of a substrate (3) with a layer of material comprising at least one first and a second material component and for the production of a plasma discharge, more especially an arc discharge (35), having an anode arrangement (5), which provides the first material component at an anode material surface (13) for evaporation, and a cathode arrangement (7), which provides the second material component at a cathode material surface (25). The electrode arrangement is characterized in that the cathode material surface (25) is constituted by an evaporation-active part (27) supporting the plasma discharge (35) and an evaporation-inactive part (41) not supporting the plasma discharge. Preferably, a motion-producing means (49) is provided for moving the evaporation-inactive part (41) over the cathode material surface (25) in order to reduce deposit of material due to he first material component on the cathode material surface (25).
REFERENCES:
patent: 4868003 (1989-09-01), Temple et al.
patent: 5009922 (1991-04-01), Harano et al.
patent: 5015493 (1991-05-01), Gruen
patent: 4026494 (1992-02-01), None
patent: 1103630 (2001-05-01), None
patent: 11-100661 (1999-04-01), None
patent: 2001192815 (2001-07-01), None
patent: WO-9858095 (1998-12-01), None
patent: WO0046418 (2000-08-01), None
Search Report from corresponding European Application No. EP 00 12 4558, dated Mar. 13, 2001.
Bangert Stefan
Budke Elisabeth
Gebele Thomas
Grimm Helmut
Henrich Jurgen
Applied Films GmbH & Co. KG
Hassanzadeh Parviz
Van Dyke Gardner, Linn & Burkhart, LLP
LandOfFree
Electrode arrangement does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electrode arrangement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrode arrangement will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3419065