Effusion cell crucible with thermocouple

Details Effusion cell crucible with thermocouple Effusion cell crucible with thermocouple

1998-06-23

1999-08-31

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

392389, C23C 1400

Patent

active

059449039

ABSTRACT:
A crucible with a thermocouple temperature sensor for use in a vapor effusion cell is disclosed. The upper portion of the crucible consists of a cup which contains a small quantity of the source material to be evaporated. A stem protruding from the base of the crucible has a deep well inside which a thermocouple is held, such that the thermocouple junction does not contact the crucible. The heat transfer to the junction is by radiation from the hot inner walls of the well. The junction temperature is slightly lower than, but reproducibly related to, the crucible temperature.

REFERENCES:
patent: 4239955 (1980-12-01), Cho
patent: 4426569 (1984-01-01), Miller
patent: 5540780 (1996-07-01), Hass
patent: 5714008 (1998-02-01), Lee

Affiliated with

Also associated with

Rating

Effusion cell crucible with thermocouple does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Effusion cell crucible with thermocouple, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Effusion cell crucible with thermocouple will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2425580