Effusion cell

Details Effusion cell Effusion cell

1999-09-21

2000-12-19

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

392389, C23C 1400

Patent

active

061623008

ABSTRACT:
An effusion cell having a ceramic valve mechanism.

REFERENCES:
patent: 4181544 (1980-01-01), Cho
patent: 4239955 (1980-12-01), Cho
patent: 4426569 (1984-01-01), Miller et al.
patent: 4543467 (1985-09-01), Eisele et al.
patent: 4813373 (1989-03-01), Demay et al.
patent: 5034604 (1991-07-01), Streetman et al.
patent: 5041719 (1991-08-01), Harris et al.
patent: 5080870 (1992-01-01), Streetman et al.

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