Electrical contact apparatus for use with plasma or glow dischar

Details Electrical contact apparatus for use with plasma or glow dischar Electrical contact apparatus for use with plasma or glow dischar

1989-06-02

1990-04-17

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

439805, C23C 1650

Patent

active

049170449

ABSTRACT:
An electrical contact apparatus for use in a plama or glow discharge chamber, particularly a chamber for depositing silicon oxynitride. A feedthrough member provides an electrical path between the interior and exterior of the chamber. An electrical contact member having an outwardly domed surface engages the feedthrough member. A non-conductive collar is disposed about the domed surface for limiting the flow of gas around the domed surface.

REFERENCES:
patent: 4401507 (1983-08-01), Engle
patent: 4422407 (1983-12-01), Bessot et al.

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