Effusion cell for Si and molecular beam epitaxy system

Details Effusion cell for Si and molecular beam epitaxy system Effusion cell for Si and molecular beam epitaxy system

1998-01-28

2000-10-31

Fiorilla, Christopher A.

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118715, C23C 1600

Patent

active

061396435

ABSTRACT:
A crucible is formed of metal, that is, any one of Mo, Ta and W with a thickness of 3 mm or more, and the crucible is melted to produce melted Si liquid, thereby forming a molecular beam. An inner surface of the crucible can be coated with silicide. Also, resistance-type heaters can be used to heat solid Si in the crucible into the liquid Si. Such heaters can include reflection portions surrounding the crucible. The crucible can be used as an effusion cell in a molecular beam epitaxy system.

REFERENCES:
patent: 4239955 (1980-12-01), Cho
patent: 4330360 (1982-05-01), Kubiak et al.
patent: 4383872 (1983-05-01), Roberts
patent: 5034604 (1991-07-01), Streetman et al.
patent: 5336324 (1994-08-01), Stall et al.
patent: 5544618 (1996-08-01), Stall et al.
patent: 5827371 (1998-10-01), Colombo et al.

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