Multi-zone gas injection apparatus and method for microelectroni
Multideposition SACVD reactor
Multiple station apparatus for liquid source fabrication of...
Multiple substrate processing apparatus for enhanced throughput
Multipurpose processing chamber for chemical vapor deposition pr
Nickel carbonyl vapour deposition apparatus and method
Open tube-type impurity-diffusion apparatus for simultaneously d
Optical transmission systems and apparatuses including bragg...
Optical transmission systems and apparatuses including bragg...
Oxidation metod
Parylene deposition apparatus including a heated and cooled dime
Parylene deposition apparatus including a heated and cooled supp
Parylene deposition apparatus including a post-pyrolysis filteri
Parylene deposition apparatus including a tapered deposition cha
Parylene deposition apparatus including an atmospheric shroud an
Parylene deposition apparatus including dry vacuum pump system a
Parylene deposition chamber and method of use
Parylene deposition chamber and method of use
Phosphorus effusion source
Photo-chemical vapor deposition apparatus having exchange appara