Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent
1989-12-18
1990-09-18
Beck, Shrive
Coating apparatus
Gas or vapor deposition
Multizone chamber
118723, 118730, 118308, 118310, 4272557, 427 451, C23C 1600
Patent
active
049570617
ABSTRACT:
A device for blowing fine particles is provided which comprises a plural number of upstream chambers for jetting out fine particles provided against a movable substrate. Each of the upstream chambers may be provided with a gas exciter, and also may be provided with an energy imparter for imparting energy to the substrate.
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Bunshah, et al.; "Deposition Technologies for Films and Coatings"; Copyright 1982 by Noyes Publications; pp. 255-256.
Ando Kenji
Den Tohru
Hamamoto Takashi
Haruta Masahiro
Kamiya Osamu
Bashore Alain
Beck Shrive
Canon Kabushiki Kaisha
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