4. Semiconductor device manufacturing: process
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Atomic force microscopy and signal acquisition via buried...

Semiconductor device manufacturing: process – With measuring or testing
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Atomic hydrogen as a surfactant in production of highly...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with subsequent...
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Atomic implantation and thermal treatment of a semiconductor...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
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Atomic layer deposited dielectric layers

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Atomic layer deposited HfSiON dielectric films wherein each...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Atomic layer deposited lanthanide doped TiOx dielectric films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Atomic layer deposited nanolaminates of HfO 2 /ZrO 2 films...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Atomic layer deposited nanolaminates of HfO2/ZrO2 films as...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Atomic layer deposited tantalum containing adhesion layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Atomic layer deposited Zr-Sn-Ti-O films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Atomic layer deposited Zr-Sn-Ti-O films using TiI 4

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Atomic layer deposited Zr-Sn-Ti-O films using TiI4

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Atomic layer deposited ZrAl x O y dielectric layers...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Atomic layer deposited ZrTiO 4 films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Atomic layer deposition

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Atomic layer deposition (ALD) method with enhanced...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Atomic layer deposition apparatus and method

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Atomic layer deposition metallic contacts, gates and...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Atomic layer deposition method for depositing a layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Atomic layer deposition method of forming an oxide...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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