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Air gap under on-chip passive device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Air gaps between conductive lines for reduced RC delay of...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having air-gap dielectric
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Air pocket resistant semiconductor package system

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Metallic housing or support
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Air voids underneath metal lines to reduce parasitic capacitance

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Air-bridge integration scheme for reducing interconnect delay

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having air-gap dielectric
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Air-curtain forming apparatus for wafer hermetic container...

Semiconductor device manufacturing: process – Miscellaneous
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Air-gap insulated interconnections

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Airdome enclosure for components

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Airgap for semiconductor devices

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Al 2 O 3 atomic layer deposition to enhance the deposition...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
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Al x In y Ga 1-x-y N mixture crystal substrate, method of...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
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Al-Cu alloy sputtering method with post-metal quench

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Al-doped charge trap layer and non-volatile memory device...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Al-doped charge trap layer, non-volatile memory device and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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AlCu metal deposition for robust Rc via performance

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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ALD deposition of ruthenium

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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ALD gate electrode

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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ALD metal oxide deposition process using direct oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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ALD metal oxide deposition process using direct oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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ALD metal oxide deposition process using direct oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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