Airdome enclosure for components

Details Airdome enclosure for components Airdome enclosure for components

2006-04-25

2006-04-25

Flynn, Nathan J. (Department: 2823)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Total dielectric isolation

C438S421000, C438S619000

Reexamination Certificate

active

07033906

ABSTRACT:
A component having an airdome enclosure that protects the component from its external environment. An airdome enclosure according to the present techniques avoids the high costs of employing special materials and/or specialized process steps in the manufacture of a component. An electronic component according to the present techniques includes a set of substructures formed on a substrate and an airdome enclosure over the substructures that protects the substructures and that hinders the formation of parasitic capacitances among the substructures.

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patent: 2003/0104688 (2003-06-01), Wade

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