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Advanced control for plasma process

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Advanced copper damascene structure

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Advanced damascene planar stack capacitor fabrication method

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Advanced etching method for VLSI fabrication

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Patent

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Advanced fabrication technique to form ultra thin gate...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Advanced high-k gate stack patterning and structure...

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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Advanced IC bonding pad design for preventing stress induced pas

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Advanced isolation process for large memory arrays

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Advanced isolation scheme for deep submicron technology

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with preceding...
Patent

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Advanced JFET with reliable channel control and method of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having junction gate
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Advanced low dielectric constant organosilicon plasma...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Advanced methods for making semiconductor devices by low tempera

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Thinning of semiconductor substrate
Patent

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Advanced MOSFET design

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Advanced multilayer dielectric cap with improved mechanical...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Advanced process control (APC) of copper thickness for...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
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Advanced process control for low variation treatment in...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Advanced process control model incorporating a target offset...

Semiconductor device manufacturing: process – With measuring or testing
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Advanced process control of the manufacture of an...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Advanced process control of thermal oxidation processes, and...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
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Advanced RF enhancement-mode FETs with improved gate properties

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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