Self-aligned channel implantation
Self-aligned channel transistor and method for making same
Self-aligned charge storage region formation for...
Self-aligned coating on released MEMS
Self-aligned cobalt silicide on MOS integrated circuits
Self-aligned collar and strap formation for semiconductor...
Self-aligned complementary LDMOS
Self-aligned composite insulator with sub-half-micron multilevel
Self-aligned conductive spacer process for sidewall control...
Self-aligned connection to underlayer metal lines through unland
Self-aligned connector for stacked chip module
Self-aligned contact (SAC) etch with dual-chemistry process
Self-aligned contact (SAC) etching using polymer-building chemis
Self-aligned contact areas for sidewall image transfer...
Self-aligned contact for closely spaced transistors
Self-aligned contact for trench DMOS transistors
Self-aligned contact formation for semiconductor devices
Self-aligned contact formation for semiconductor devices
Self-aligned contact formation utilizing sacrificial...
Self-aligned contact process