Low-fluence irradiation for lateral crystallization enabled...
Low-fluence irradiation for lateral crystallization enabled...
Low-GIDL MOSFET structure and method for fabrication
Low-k b-doped SiC copper diffusion barrier films
Low-K dielectric constant CVD precursors formed of cyclic...
Low-K dielectric etch process for dual-damascene structures
Low-k dielectric film with good mechanical strength
Low-K Dielectric layer and method of making same
Low-k dielectric layer stack including an etch indicator...
Low-k dielectric layer with air gaps
Low-k dielectric layer with overlying adhesion layer
Low-k dielectric material system for IC application
Low-k dielectric materials and processes
Low-k dielectric process for multilevel interconnection...
Low-K dual damascene integration process
Low-K gate spacers by fluorine implantation
Low-k interconnect structure comprised of a multilayer of...
Low-k SiC copper diffusion barrier films
Low-K SiC copper diffusion barrier films
Low-K spacer structure for flash memory