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Deeply doped source/drains for reduction of silicide/silicon...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Defect and etch rate control in trench etch for dual...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Defect compensation method for semiconductor element

Semiconductor device manufacturing: process – Gettering of substrate – By layers which are coated – contacted – or diffused
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Defect control in formation of dielectrically isolated semicondu

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Defect control in gate dielectrics

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Defect detection using liquid crystal and internal heat source

Semiconductor device manufacturing: process – With measuring or testing
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Defect gettering by induced stress

Semiconductor device manufacturing: process – Gettering of substrate – By layers which are coated – contacted – or diffused
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Defect identification system and method for repairing killer...

Semiconductor device manufacturing: process – Repair or restoration
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Defect induced buried oxide (DIBOX) for throughput SOI

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Defect inspecting method

Semiconductor device manufacturing: process – With measuring or testing
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Defect inspection apparatus and defect inspection method

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Defect reduction in semiconductor materials

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Defect reduction of non-polar and semi-polar III-nitrides...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Defect-free junction formation using laser melt annealing of...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Defect-free semiconductor templates for epitaxial growth and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Defect-free thin and planar film processing

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Defect-minimizing, topology-independent planarization of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Defective semiconductor redistribution labeling system

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Defectivity and process control of electroless deposition in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Defectivity and process control of electroless deposition in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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