Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-10-05
2009-11-10
Richards, N Drew (Department: 2895)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S761000, C438S778000, C438S782000, C252S519140, C252S520400, C252S521400, C257S635000, C257S766000
Reexamination Certificate
active
07615491
ABSTRACT:
Methods and compositions for electrolessly depositing Co, Ni, or alloys thereof onto a substrate in manufacture of microelectronic devices. Grain refiners, levelers, oxygen scavengers, and stabilizers for electroless Co and Ni deposition solutions.
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Chen Qingyun
Hurtubise Richard
Paneccasio Vincent
Petrov Nicolai
Stritch Daniel
Enthone Inc.
Garcia Joannie A
Richards N Drew
Senniger Powers LLP
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