Microbridge structure and method for forming a microstructure su

Microchannel-element assembly and preparation method thereof

Microelectromechanical (MEM) device including a spring...

Microelectromechanical (MEM) device with a protective cap...

Microelectromechanical device having a stiffened support...

Microelectromechanical structure and process of making same

Microelectromechanical system and process of making the same

Microelectromechanical system based sensors, sensor arrays,...

Microelectromechanical system package and the method for...

Microelectromechanical systems component and method of...

Microelectromechanical systems having stored charge and...

Microelectronic assembly and method for forming the same

Microelectronic device

Microelectronic imaging units and methods of manufacturing...

Microfabricated transducers formed over other circuit...

Microfabrication using germanium-based release masks

Micromachine production method

Micromachined device having electrically isolated components...

Micromachined electromechanical device

Micromechanical actuator with multiple-plane comb electrodes...