Microelectromechanical (MEM) device including a spring...

Details Microelectromechanical (MEM) device including a spring... Microelectromechanical (MEM) device including a spring...

2007-09-25

2007-09-25

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

Reexamination Certificate

active

10985530

ABSTRACT:
A microelectromechanical (MEM) device includes a substrate, a suspension spring, a structure, and a release bridge. The suspension spring is coupled to, and suspended above, the substrate. The structure is coupled to the suspension spring and is resiliently suspended thereby above the substrate. The release bridge is coupled to the suspension spring. During sensor manufacture, the suspension spring and structure are suspended above the substrate by undergoing a release process. The release bridge is sized such that, during the release process, the structure and the suspension spring are released substantially simultaneously.

REFERENCES:
patent: 5258097 (1993-11-01), Mastrangelo
patent: 5542295 (1996-08-01), Howe et al.
patent: 5721377 (1998-02-01), Kurle et al.
patent: 6232104 (2001-05-01), Ferrari et al.
patent: 6538296 (2003-03-01), Wan
patent: 6544898 (2003-04-01), Polson et al.
patent: 6770506 (2004-08-01), Gogoi
patent: 7102467 (2006-09-01), Lutz et al.
patent: 2003/0032215 (2003-02-01), Ives
patent: 2004/0053434 (2004-03-01), Bruner
Sulfridge et al., “Optical Actuation of a Bistable MEMS”, IEEE, Journal of Microelectromechanical Systems, vol. 11, No. 5, Oct. 2003, pp. 574-583.

Affiliated with

Also associated with

Rating

Microelectromechanical (MEM) device including a spring... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microelectromechanical (MEM) device including a spring..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectromechanical (MEM) device including a spring... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3782427