Micromechanical actuator with multiple-plane comb electrodes...

Details Micromechanical actuator with multiple-plane comb electrodes... Micromechanical actuator with multiple-plane comb electrodes...

2007-04-17

2007-04-17

Picardat, Kevin M. (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S050000, C438S051000, C257SE29324

Reexamination Certificate

active

11224119

ABSTRACT:
A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

REFERENCES:
patent: 6636653 (2003-10-01), Miracky et al.
patent: 6794217 (2004-09-01), Lee et al.
patent: 6914710 (2005-07-01), Novotny et al.
patent: 7034370 (2006-04-01), Kuo
patent: 7071109 (2006-07-01), Novotny et al.
patent: 2001/0044165 (2001-11-01), Lee et al.
patent: 2003/0203530 (2003-10-01), Lee et al.

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