Methods of forming packaged micro-electromechanical devices

Methods of forming thermo-mechanical sensor

Methods of making electromechanical three-trace junction...

Methods of making electromechanical three-trace junction...

Micro electro-mechanical system and method of manufacturing...

Micro mechanical component and production process thereof

Micro mirror unit and method of making the same

Micro structure with interlock configuration

Micro-electro mechanical device made from mono-crystalline silic

Micro-electro mechanical device made from mono-crystalline...

Micro-electro-mechanical optical device

Micro-electro-mechanical system (MEMS) sensor and method for...

Micro-electro-mechanical system device and method for making...

Micro-electro-mechanical-system package and method for...

Micro-electromechanical actuator and methods of use and...

Micro-electromechanical system (MEMS) based current and...

Micro-machined electromechanical system (MEMS) accelerometer...

Micro-machining

Micro-mechanically strained semiconductor film

Microactuator, method for making the same, and magnetic head...