Micro-electro-mechanical system (MEMS) sensor and method for...

Details Micro-electro-mechanical system (MEMS) sensor and method for... Micro-electro-mechanical system (MEMS) sensor and method for...

2011-04-05

2011-12-06

Li, Meiya (Department: 2811)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C257S254000, C257S415000, C257S419000, C438S022000, C438S024000, C438S048000, C438S052000, C438S053000, C216S002000, C216S011000, C216S075000, C216S079000, C381S174000, C073S066000, C073S464000, C073S514220, C073S570000, C073S574000, C073S575000, C073S584000, C073S777000, C073S780000

Reexamination Certificate

active

08071413

ABSTRACT:
The present invention discloses an MEMS sensor and a method for making the MEMS sensor. The MEMS sensor according to the present invention includes: a substrate including an opening; a suspended structure located above the opening; and an upper structure, a portion of which is at least partially separated from a portion of the suspended structure; wherein the suspended structure and the upper structure are separated from each other by a step including metal etch.

REFERENCES:
patent: 6012336 (2000-01-01), Eaton et al.
patent: 6146543 (2000-11-01), Tai et al.
patent: 6536281 (2003-03-01), Abe et al.
patent: 6743654 (2004-06-01), Coffa et al.
patent: 6928879 (2005-08-01), Partridge et al.
patent: 7121146 (2006-10-01), Hopper et al.
patent: 7135149 (2006-11-01), DeSilets et al.
patent: 2004/0253755 (2004-12-01), Chen et al.
patent: 2005/0249041 (2005-11-01), Pedersen
patent: 2006/0078137 (2006-04-01), Su et al.
patent: 2006/0236537 (2006-10-01), Chen et al.
patent: 2007/0201710 (2007-08-01), Suzuki et al.
patent: 2007/0284682 (2007-12-01), Laming et al.
patent: 2008/0137884 (2008-06-01), Kim et al.
patent: 2008/0137886 (2008-06-01), Schrank
patent: 2009/0166772 (2009-07-01), Hsieh et al.

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