Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2005-05-24
2005-05-24
Brock, II, Paul E (Department: 2815)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C438S053000
Reexamination Certificate
active
06897083
ABSTRACT:
A micro-electromechanical actuator and related methods of use that use a pair of electrodes separated by a linkage. The linkage is biased to a neutral position wherein the electrodes are spaced apart from each other, but also allows at least one electrode to move toward the other electrode when an appropriate force, such as voltage from the power source, is applied to the electrodes. The linkage is sized and shaped to allow the electrodes to move together when a defined threshold voltage is applied by the power source, thereby allowing the micro-elecromechanical actuator to function as a manufacturing quality testing device or a micromechanical actuator in other applications. The actuator may be fabricated simultaneously with other micromechanical and micro-electromechanical components on the same substrate using conventional semi-conductor and micro-machining manufacturing equipment.
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Brock II Paul E
Hewlett--Packard Development Company, L.P.
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