Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2011-03-08
2011-03-08
Pham, Thanh V. (Department: 2894)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C438S048000, C438S050000, C073S715000, C073S718000
Reexamination Certificate
active
07901970
ABSTRACT:
A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.
REFERENCES:
patent: 4625561 (1986-12-01), Mikkor
patent: 5821596 (1998-10-01), Miu et al.
patent: 6980412 (2005-12-01), Cheng et al.
patent: 7024936 (2006-04-01), Pedersen et al.
patent: 2002/0021122 (2002-02-01), Yao et al.
patent: 2003/0206261 (2003-11-01), Cahill
patent: 2005/0262943 (2005-12-01), Clayton et al.
patent: 1006365 (2000-06-01), None
patent: 1306678 (2003-05-01), None
Berkcan Ertugal
Claydon Glenn Scott
Kapusta Christopher James
Meyer Laura Jean
Tian Wei-Cheng
Emery Richard D.
Fernandes Errol
General Electric Company
Pham Thanh V.
LandOfFree
Micro-electromechanical system (MEMS) based current and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micro-electromechanical system (MEMS) based current and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-electromechanical system (MEMS) based current and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2716875