Fabrication of silicon micro mechanical structures

Details Fabrication of silicon micro mechanical structures Fabrication of silicon micro mechanical structures

2005-09-27

2005-09-27

Nguyen, Thanh (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S686000, C438S048000, C438S050000, C438S678000, C438S745000, C438S753000, C438S754000

Reexamination Certificate

active

06949397

ABSTRACT:
A method for protecting a material of a microstructure comprising said material and a noble metal layer against undesired galvanic etching during manufacture comprises forming on the structure a sacrificial metal layer having a lower redox potential than said material, the sacrificial metal layer being electrically connected to said noble metal layer.

REFERENCES:
patent: 5059556 (1991-10-01), Wilcoxen
patent: 5164339 (1992-11-01), Gimpelson

Affiliated with

Also associated with

Rating

Fabrication of silicon micro mechanical structures does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fabrication of silicon micro mechanical structures, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication of silicon micro mechanical structures will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3389040