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Dual layer hard mask for eDRAM gate etch process

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Dual work function gate conductors with self-aligned...

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Electroactive polymers for lithography

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Electronic component and display device and a method of...

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Fabrication method of sub-resolution pitch for integrated...

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Fabrication of ultra shallow junctions from a solid source...

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Heterojunction bipolar transistor and method for fabricating...

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High resolution dopant/impurity incorporation in...

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High temperature phosphorous oxide diffusion source

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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High voltage device and method for making the same

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Implant damage removal by laser thermal annealing

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In-situ boron doped polysilicon with dual layer and dual grain s

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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In-situ diffusion of dopant impurities during dendritic web grow

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In-situ doped silicon layers

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Integrated structure pad assembly for lead bonding

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Ion implantation with multiple concentration levels

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Laser diffusion fabrication of solar cells

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Low cost method of fabricating transient voltage suppressor...

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Low noise transistor and method of making same

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Low resistance contact structure and fabrication thereof

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