Electroactive polymers for lithography

Details Electroactive polymers for lithography Electroactive polymers for lithography

2009-04-03

2011-12-13

Wells, Nikita (Department: 2881)

Semiconductor device manufacturing: process

Introduction of conductivity modifying dopant into...

Diffusing a dopant

C430S005000, C310S328000, C310S800000

Reexamination Certificate

active

08076227

ABSTRACT:
Systems and methods for lithography include actuating an electroactive polymer member to position mask and/or substrate.

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