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Advanced RF enhancement-mode FETs with improved gate properties

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Advances in spike anneal processes for ultra shallow junctions

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Agglomeration elimination for metal sputter deposition of...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – By application of corpuscular or electromagnetic radiation
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Angled implant process

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Anti-type dosage as LDD implant

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Anti-type dosage as LDD implant

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Apparatus and method for controlling diffusion

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Apparatus and method for doping

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Apparatus and method for increasing thermal conductivity of...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – By application of corpuscular or electromagnetic radiation
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Apparatus and method for interlocking a power supply to ion...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into...
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Apparatus for and methods of implanting desired chemical species

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Apparatus for annealing, method for annealing, and method...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into...
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Apparatus for forming strontium-tantalum-oxide thin film

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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Apparatus for manufacturing a semiconductor device and a...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Approaches for shallow junction formation

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Argon amorphizing polysilicon layer fabrication

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Arrangement, dopant source, and method for making solar cells

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Article comprising gated field emission structures with...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Asymmetric MOS channel structure with drain extension and...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Athermal annealing with rapid thermal annealing system and...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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